X-ray inspection device, X-ray thin film inspection method and rocking curve measurement method

摘要

In the X-ray inspection apparatus of the present invention, the X-ray irradiation unit 40 includes a first X-ray optical element 42 for condensing characteristic X-rays in a longitudinal direction, and a second X-ray for condensing characteristic X-rays in a horizontal direction. It includes a line optical element 43 . The first X-ray optical element 42 is made of a crystalline material having high crystallinity. Moreover, the 2nd X-ray optical element 43 is comprised by the multilayer film mirror.