Yttrium Aluminum Silicate Glass Ceramic Coating For Semiconductor Chamber Apparatus

摘要

Articles may be protected against halide plasma, by applying a rare earth-containing glaze to the surface of the article. The glaze may be a coating comprising; 20 to 90 mol % SiO₂, 0 to 60 mol % Al₂O₃, 10 to 80 mol % rare earth oxides and/or rare earth fluorides (REX), wherein SiO₂+Al₂O₃+REX≥60 mol %.