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INTEGRATED OPTICAL WAVEGUIDES, DIRECT-BONDED WAVEGUIDE INTERFACE JOINTS, OPTICAL ROUTING AND INTERCONNECTS

机译:集成光学波导,直接结合的波导界面连接,光学布线和互连

摘要

Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects are provided. An example optical interconnect joins first and second optical conduits. A first direct oxide bond at room temperature joins outer claddings of the two optical conduits and a second direct bond joins the inner light-transmitting cores of the two conduits at an annealing temperature. The two low-temperature bonds allow photonics to coexist in an integrated circuit or microelectronics package without conventional high-temperatures detrimental to microelectronics. Direct-bonded square, rectangular, polygonal, and noncircular optical interfaces provide better matching with rectangular waveguides and better performance. Direct oxide-bonding processes can be applied to create running waveguides, photonic wires, and optical routing in an integrated circuit package or in chip-to-chip optical communications without need for conventional optical couplers. An example wafer-level process fabricates running waveguides, optical routing, and direct-bonded optical interconnects for silicon photonics and optoelectronics packages when two wafers are joined.
机译:提供了集成的光波导,直接粘结的波导接口接头,光路由和互连。示例性光学互连连接第一和第二光学导管。室温下的第一个直接氧化物键连接两个光导管的外包层,第二个直接键在退火温度下连接两个光导管的内部透光芯。这两个低温键使光子能够共存于集成电路或微电子封装中,而没有传统的高温对微电子有害。直接结合的方形,矩形,多边形和非圆形光学接口可更好地与矩形波导匹配,并具有更好的性能。可以采用直接氧化物键合工艺在集成电路封装或芯片到芯片的光通信中创建运行的波导,光子线和光路由,而无需常规的光耦合器。当两个晶片连接在一起时,一个示例晶片级工艺可以制造用于硅光子学和光电封装的运行波导,光学路由和直接粘结的光学互连。

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