首页> 外国专利> BONDING AND PLACEMENT TOOLS FOR BONDING MACHINES, BONDING MACHINES FOR BONDING SEMICONDUCTOR ELEMENTS, AND RELATED METHODS

BONDING AND PLACEMENT TOOLS FOR BONDING MACHINES, BONDING MACHINES FOR BONDING SEMICONDUCTOR ELEMENTS, AND RELATED METHODS

机译:用于接合机的接合和放置工具,用于接合半导体元件的接合机以及相关方法

摘要

A bonding tool for bonding a semiconductor element to a substrate on a bonding machine is provided. The bonding tool includes a body portion including a contact region for contacting the semiconductor element during a bonding process on the bonding machine. The body portion defines a non-contact region adjacent the contact region. The bonding tool also includes a heat resistant coating applied to the non-contact region.
机译:提供一种用于在接合机上将半导体元件接合至基板的接合工具。接合工具包括主体部分,该主体部分包括用于在接合机器上的接合过程中与半导体元件接触的接触区域。主体部分限定与接触区域相邻的非接触区域。接合工具还包括施加到非接触区域的耐热涂层。

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