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Bonding tools for bonding machines, bonding machines for bonding semiconductor elements, and related methods

机译:用于粘合机的粘接工具,用于粘合半导体元件的粘合机,以及相关方法

摘要

A bonding tool for bonding a semiconductor element to a substrate on a bonding machine is provided. The bonding tool includes a body portion including a contact region for contacting the semiconductor element during a bonding process on the bonding machine. The bonding tool also includes a standoff extending from the body portion, and configured to contact the substrate during at least a portion of the bonding process.
机译:提供了一种用于将半导体元件粘合到粘合机上的基板的粘合工具。粘合工具包括主体部分,该主体部分包括用于在接合机上的键合工艺期间接触半导体元件的接触区域。粘合工具还包括从主体部分延伸的支座,并且构造成在键合工艺的至少一部分期间接触基板。

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