PHOTONIC CRYSTALS IN MICRO LIGHT-EMITTING DIODE DEVICES

摘要

Embodiments relate to a micro light emitting diode (LED) having photonic crystal columns extending from a surface to the opposite surface of a transparent semiconductor layer to increase directionality of the light emitted from the micro LED. The photonic crystal columns are arranged in two-dimension. The photonic crystal columns can be produced by etching the transparent semiconductor layer with plasma and growing the photonic crystal columns in the transparent semiconductor layer. The photonic crystal columns can also be produced by etching nano-meter scale regions of the transparent semiconductor layer.