Apparatus and Methods for Self-Correcting Pressure Based Mass Flow Controller

摘要

A self-correcting pressure-based mass flow control apparatus includes outlet pressure sensing to enable correction for non-ideal operating conditions. Further the mass flow control apparatus having a fluid pathway, a shutoff valve in the fluid pathway, a reference volume in the fluid pathway, a first pressure measuring sensor in fluid communication with the reference volume, a first temperature measuring sensor providing a temperature signal indicative of the fluid temperature within the reference volume, a proportional valve in the fluid pathway, and a second pressure measuring sensor in fluid communication with the fluid pathway.