MEMS DEVICE AND MANIPULATION METHOD FOR MICRO-OBJECTS

摘要

A micro-electro-mechanical systems (MEMS) includes a flexible membrane that creates a suction force by flexing to permit manipulation of a microscale object. The MEMS element includes a casing structure; a flexible membrane attached to the casing structure; and an electrode structure, wherein a voltage applied to the electrode structure causes the flexible membrane to flex relative to the casing structure. The flexible membrane and the casing structure define a gap into which the flexible membrane may flex, and a foot extending from the flexible membrane in a direction away from the casing structure, wherein the foot and the flexible membrane define a clearance region on an opposite side of the flexible membrane from the gap. When the MEMS element interacts with an object to be manipulated the foot spaces the membrane apart from the object, and flexing of the membrane generates the suction force for manipulating the object.