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Method of Real Time In-Situ Chamber Condition Monitoring Using Sensors and Rf Communication
Method of Real Time In-Situ Chamber Condition Monitoring Using Sensors and Rf Communication
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机译:基于传感器和射频通信的实时原位腔室状态监测方法
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摘要
Plural sensors on an interior surface of a reactor chamber are linked by respective RF communication channels to a hub inside the reactor chamber, which in turn is linked to a process controller outside of the chamber.
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