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METHOD OF REAL TIME IN-SITU CHAMBER CONDITION MONITORING USING SENSORS AND RF COMMUNICATION
METHOD OF REAL TIME IN-SITU CHAMBER CONDITION MONITORING USING SENSORS AND RF COMMUNICATION
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机译:传感器和射频通信实时原位腔状态监测的方法
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摘要
Plural sensors on an interior surface of a reactor chamber are linked by respective RF communication channels to a hub inside the reactor chamber, which in turn is linked to a process controller outside of the chamber.
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