首页> 外国专利> POLYMER MATERIAL FOR SELF-ASSEMBLY, SELF-ASSEMBLED FILM, METHOD FOR PRODUCING SELF-ASSEMBLED FILM, PATTERN, AND METHOD FOR FORMING PATTERN

POLYMER MATERIAL FOR SELF-ASSEMBLY, SELF-ASSEMBLED FILM, METHOD FOR PRODUCING SELF-ASSEMBLED FILM, PATTERN, AND METHOD FOR FORMING PATTERN

机译:用于自组装膜的聚合物材料,自组装膜的制造方法,图案以及形成图案的方法

摘要

Provided is a polymer material for self-assembly, a self-assembled film, a method for producing a self-assembled film, a pattern, and a method for forming a pattern all of which are capable of reducing defects based on faulty microscopic phase separation sites and capable of forming a fine, minute pattern. The polymer material for self-assembly of the present invention contains a multi-block copolymer of a triblock copolymer or more containing a first polymer block containing a structural unit having a specific structure and a second polymer block containing a structural unit having a specific structure. The first polymer block and the second polymer block are coupled with each other.
机译:提供用于自组装的聚合物材料,自组装膜,自组装膜的制造方法,图案和图案形成方法,这些均能够基于不良的微观相分离而减少缺陷。并能够形成精细的微小图案。本发明的用于自组装的聚合物材料包含三嵌段共聚物或更多的多嵌段共聚物,所述多嵌段共聚物包含含有具有特定结构的结构单元的第一聚合物嵌段和含有具有特定结构的结构单元的第二聚合物嵌段。第一聚合物嵌段和第二聚合物嵌段彼此偶联。

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