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APPROACH TO LOWERING EXTREME ULTRAVIOLET EXPOSURE DOSE FOR INORGANIC HARDMASKS FOR EXTREME ULTRAVIOLET PATTERNING
APPROACH TO LOWERING EXTREME ULTRAVIOLET EXPOSURE DOSE FOR INORGANIC HARDMASKS FOR EXTREME ULTRAVIOLET PATTERNING
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机译:减少无机硬质涂料极端紫外线照射剂量的方法
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摘要
An extreme ultraviolet lithography pattern stack, including, an inorganic hardmask layer, an under layer on the inorganic hardmask layer, and a resist layer on the under layer, where the inorganic hardmask layer, under layer, and resist layer have a combined thickness in the range of about 8.5 nm to about 70 nm.
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