stamp for a print lithography process, method of making a stamp, parts kit for making a stamp, method of forming a patterned layer and use of a stamp

摘要

Stamp for a print lithography process, method of making a stamp, kit for making a stamp, method of forming a patterned layer and use of a stamp the present invention discloses a stamp (14) for an embossing lithography process, the embossing comprising an elastomeric embossing body including a main portion of polysiloxane (110) and a patterned surface comprising an embossing pattern (16) for embossing a embossing (12), wherein the elastomeric stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomeric stamp body. Also described are manufacturing methods for such a stamp and a method of forming a patterned layer on a substrate using such a stamp.