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GAS SENSOR AND METHOD OF DETECTING ONE OR MORE GASES

机译:气体传感器和一种或多种气体的检测方法

摘要

Gas sensor and method of detecting one or more gases. This invention refers to a gas sensor and a method for collecting one or more gases. An arrangement incorporates a collection electrode arrangement maintained at similar or different temperatures,In such a way that the sensitivity and selectivity of the type of device may have the fine tuning adjusted between different pairs of absorption electrodes. A specific modality relevant to a gas sensor arrangement for monitoring combustion exhaust and /or by -products Of reaction reactionChemistry. A device modality related to this invention operates in high temperatures and can withstand hostile chemical environments. The arrangements of the device are made on a single substrate. Devices can also be made on individual 15Al substrates and monitored individuallyBecause they are part of an arrangement on a single substrate. The device can incorporate catchment electrodes into the same environment,Which allows the electrodes to be coplanar and,This way,Keep manufacturing costs down. The modalities of the device may provide improvement in sensitivity,Signal selectivity and interference through surface temperature control.
机译:气体传感器和检测一种或多种气体的方法。本发明涉及一种气体传感器和一种或多种气体的收集方法。装置结合有保持在相似或不同温度的收集电极装置,以这种方式使得装置类型的灵敏度和选择性可以在不同的吸收电极对之间进行微调。与用于监测燃烧废气和/或反应反应化学副产物的气体传感器装置有关的特定模式。与本发明有关的装置形式在高温下操作并且可以承受不利的化学环境。装置的布置在单个基板上进行。器件也可以在单独的15Al衬底上制造并进行单独监控,因为它们是单个衬底上的一部分。该设备可将集水电极整合到同一环境中,从而使电极共面,从而降低制造成本。该装置的形式可以通过表面温度控制来改善灵敏度,信号选择性和干扰。

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