SEMICONDUCTORS FAILURE ANALYSIS IN INTEGRATED CURCUITS USING OPTICAL TECHNIQUES

摘要

The invention relates to an apparatus of analyzing failure of semiconductors using optical techniques. The invention also relates to a method used in analyzing failure of semiconductors using optical techniques. It also relates to a system that is applied failure analysis of semiconductors using optical techniques. This invention has the capability to simultaneous acquisition of the reflectance image and OBIC/OBIRCH map can be accomplished in one run of the scan.