TARGET FOR SPARK VAPORIZATION WITH PHYSICAL LIMITING OF THE PROPAGATION OF THE SPARK

摘要

The present invention relates to a target for an ARC source having a firstbody (3) of amaterial to be vaporized, which essentially comprises in one plane a surfacewhich isintended to be vaporized, wherein the surface surrounds in this plane acentral area,characterized in that in the central area a second body (7) is provided, whichis preferablyin the form of a disk and is electrically isolated from the first body (3), insuch a way that thesecond body (7) can essentially provide no electrons for maintaining a spark.