METHOD FOR OPERATING AN INTEGRATED MEMS MICROPHONE DEVICE AND INTEGRATED MEMS MICROPHONE DEVICE

摘要

A method for operating an integrated MEMS microphone device (1) is proposed. The integrated MEMS microphone device (1) comprises a package housing (10) enclosing an interior cavity (16), wherein an integrated MEMS microphone die (12) with a movable membrane (19), at least one environmental sensor (13) and a thermal decoupling circuit (14) are arranged inside the cavity (16). The method comprising the steps of repeatedly operating the environmental sensor (13) in a measurement mode (MM) and activating the thermal decoupling circuit (14) for a transition phase (TP1, TP2) preceding and/or succeeding the measurement mode (MM) of the environmental sensor (13). During the transition phase (TP1, TP2) a heat dissipation into the cavity (16) is gradually adjusted.