According to the present invention, in an inspection device which performs an inspection on a substrate with a tester by contacting the substrate with a plurality of probes of a probe card, this contact accuracy assurance method includes: placing, on a stage, an alignment substrate which has a plurality of first marks; aligning the alignment substrate on the stage; mounting, at a prescribed position of a mounting part of the probe card, a position checking member which has a plurality of second marks at positions corresponding to the first marks of the alignment substrate, and which is composed of a transparent body simulating the probe card; placing the alignment substrate at a prescribed position in a contact region directly below the position checking member; capturing images of the first and second marks with position checking cameras which have vertical image capturing directions and are provided at positions respectively corresponding to the second marks in an upper side of the position checking member, and detecting horizontal deviations between the first marks and the second marks; and assuring the contact accuracy of the substrate and the probes of the probe card, when the deviations are within an allowable range.
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