THIN FILM SURFACE HEATING ELEMENT, MANUFACTURING METHOD THEREOF, AND THIN FILM SURFACE HEATING APPARATUS USING SAME

摘要

The present invention relates to a manufacturing method of a thin film surface heating element, and a thin film surface heating apparatus using the same. The manufacturing method includes the following steps: (S1) depositing a thin film layer (20) formed of a heating body material on an upper or lower surface of a substrate (10); (S2) forming a protective film layer (30) on the thin film layer (20); (S3) forming an electrode layer (40) in contact with the thin film layer (20); and (S4) connecting the electrode layer (40) to a power source. A current supplied from the power source flows through the thin film layer (20) to generate resistance heat due to resistance. The entire surface of the thin film layer is heated by the applied current through the thin film layer uniformly coated with a heat generating material having a proper resistance on a ceramic substrate, so that uniform heat supply can be achieved. Not only a rapid thermal shock is prevented, but also a very rapid temperature rise is possible because the heating element has a very small volume as compared with a conventional resistance heating wire, so that an energy saving effect by uniform heat generation and rapid heat generation can be exhibited.;COPYRIGHT KIPO 2019