Automated Laser Ablation of Inhomogeneous Metal Oxide Films to Manufacture Uniform Surface Temperature Profile Electrical Heating Elements

摘要

This paper presents automated laser ablation strategies to improve the temperature distribution across the surface of inhomogeneous Ni-Fe-Cr-NiO electrical heating elements during joule heating. A number of iterative closed-loop laser control algorithms have been developed and analyzed in order to assess their impact on the efficacy of the heating element, in terms of homogeneous temperature control, and on the implications for automated fabrication of inhomogeneous metal oxide films. Analysis shows that the use of the leading method, i.e., use of a temperature-dependent variable-power approach with memory of previous processes, showed a 68% reduction in the standard deviation of the temperature distribution of the heating element and a greater uniformity of temperature profile as compared to existing manual methods of processing.