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Apparatus for vacuum processing of a substrate, system for vacuum processing of a substrate, and method for transferring a substrate carrier and a mask carrier in a vacuum chamber
Apparatus for vacuum processing of a substrate, system for vacuum processing of a substrate, and method for transferring a substrate carrier and a mask carrier in a vacuum chamber
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机译:用于基板的真空处理的设备,用于基板的真空处理的系统以及在真空室中转移基板载体和掩模载体的方法
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摘要
An apparatus for vacuum processing a substrate is described. The apparatus includes a vacuum chamber, a substrate transfer assembly, a mask transfer assembly, and an alignment system, wherein the alignment system has an actuator and a mechanical isolation element between the actuator and the vacuum chamber.
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