Method for controlling the shape of nanoscale and microscale patterns

摘要

Provided is a method for controlling a shape of a micropattern. The method may comprise the steps of: preparing a first master substrate including a first master pattern; providing a soft material on the first master substrate; separating the soft material from the first master substrate to produce a base substrate including a first duplicate pattern having a reverse image of the first master pattern; transforming the first duplicate pattern into a second duplicate pattern by bringing the second master substrate including the second master pattern into contact with the base substrate; providing a functional material on the base substrate including the second duplicate pattern; and transferring the functional material onto a target substrate.