首页> 外国专利> POLARIZED IMAGE OBTAINING APPARATUS PATTERN INSPECTING APPARATUS POLARIZED IMAGE OBTAINING METHOD AND PATTERN INSPECTING METHOD

POLARIZED IMAGE OBTAINING APPARATUS PATTERN INSPECTING APPARATUS POLARIZED IMAGE OBTAINING METHOD AND PATTERN INSPECTING METHOD

机译:偏振图像获取装置图案检查装置偏振图像获取装置和图案检查方法

摘要

According to one aspect of the present invention, a device for acquiring polarized image comprises: a rotatable diaphragm for changing the angle of a passing area such that the passing area of a light passing through an object lens is gathered in two regions opposite to each other across a central axis among 4n regions divided by 4n in a rotational symmetry within a surface orthogonal to a proceeding direction of the light passing through the object lens, while 2 regions of the 4n regions are sequentially become the passing area; and a rotatable half-wave plate converting a P-polarized light component in a same direction and an S-polarized light component in an orthogonal direction with respect to the angle of the passing region passing through the diaphragm into predetermined deflection waves in first and second orthogonal directions.
机译:根据本发明的一个方面,一种用于获取偏振图像的设备包括:可旋转的光阑,用于改变通过区域的角度,使得穿过物镜的光的通过区域聚集在彼此相对的两个区域中。在与通过物镜的光的行进方向正交的面内,以旋转对称的方式在被4n除以4n的区域中的中心轴上横切,而4n区域中的2个区域依次成为通过区域。旋转半波片,将相对于通过光圈的通过区域的角度,将相同方向的P偏振光分量和正交的S偏振光分量转换为规定的偏转波。正交方向。

著录项

  • 公开/公告号KR20180138179A

    专利类型

  • 公开/公告日2018-12-28

    原文格式PDF

  • 申请/专利权人 NUFLARE TECHNOLOGY INC.;

    申请/专利号KR20180069890

  • 发明设计人 OGAWA RIKI;

    申请日2018-06-18

  • 分类号G01N21/956;G01N21/88;G02B27/28;G03F1/84;

  • 国家 KR

  • 入库时间 2022-08-21 11:52:15

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