The polarization image acquisition device of one embodiment of the present invention is a position opposite to a mask substrate with respect to an objective lens and is disposed near a pupil position of an objective lens, and the P polarization wave and the S polarization wave of transmitted light after passing through the objective lens are mutually different. The split type 1/2 wave plate aligned in the orthogonal direction, the lotion prism separating the trajectory of the P-polarized wave and the trajectory of the S-polarized wave, and the P-polarized wave and the S-polarized wave passing through the lotion prism at different imaging positions, respectively. The first image which picks up the imaging lens image-forming, the mirror which reflects the other in the other imaging position different from the imaging position of one of P polarization wave and S polarization wave, and the image of one of P polarization wave and S polarization wave. A sensor, and the 2nd image sensor which picks up the other image of P polarization wave and S polarization wave are characterized by the above-mentioned.
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