1 1 Piezo actuator type axis precision control module and piezo actuator type axis precision control device

摘要

The present invention relates to a piezo actuator-type single-axis precision control module and a piezo actuator-type single-axis precision control apparatus. According to the present invention, the piezo actuator-type single-axis precision control apparatus comprises: a fixing module which includes: a fixing unit body which includes: a screw hole formed in the central unit of a floor, and two cups with penetrating holes formed on a body unit to face each other to allow the entrances to face each other, a tension spring inserted into the fixing unit body to have engagement rings formed on both sides, and fastening pins inserted into the penetrating holes on the fixing unit body to be fastened with the engagement rings on both sides of the tension spring; a piezo whose upper end is fastened with a piezo bracket, which has a pivot groove on a central axis, and which is standing on a side surface of the fixing module; a support plate fastened with a screw hole on a lower side of the fixing unit body by a lower screw to have a piezo lower end settlement groove; and an operation plate fastened with a screw hole on an upper side of the fixing unit body by an upper screw to have a pivot pivot-engaged with the pivot groove. Tensile force is formed by the piezo, and tensile restoring force is formed by the tension spring. Restoring force on the piezo axis is formed by the pivoting of the pivot and the pivot groove. According to the present invention, the piezo actuator-type single-axis precision control module and the piezo actuator-type single-axis precision control apparatus are able to use a piezoelectric element and to precisely control an equilibrium of a flat surface.