HIGH PRECISION AND LARGE TRANSLATIONAL DISPLACEMENT DEVICE USING PIEZO-ELECTRIC ACTUATOR AND METHOD OF CONTROLLING THE SAME

摘要

According to the present invention, a linear conveying device is provided. And a propulsion part provided with a piezoelectric actuator in a linear feeder, a front locking part for fixing the front end of the propulsion part for a predetermined time, and a rear end locking part for fixing the rear end of the pushing part for a predetermined time. A process of contracting the propulsion unit by contracting the piezoelectric actuator under the state of unlocking the front end lock part and the state of locking the rear end part of the lock and extending the propelling part, By repeating, the pushing section moves.