Electrolytic treatment jig and electrolytic treatment method

摘要

An electrolytic treatment jig for performing electrolytic treatment on a substrate to be processed includes a plate-like base body, electrodes provided on the base body, terminals each having elasticity provided on the base body and contacting the outer peripheral portion of the substrate to be processed, And at least one of the terminals has a detecting unit for electrically detecting that the substrate is in contact with the substrate.