首页> 外国专利> DRUM FOR ROLL-TO-ROLL DEPOSITION ROLL-TO-ROLL DEPOSITION APPARATUS AND FILM ROLL

DRUM FOR ROLL-TO-ROLL DEPOSITION ROLL-TO-ROLL DEPOSITION APPARATUS AND FILM ROLL

机译:卷对卷沉积装置卷对卷沉积装置和膜卷

摘要

According to the present invention, a drum for roll-to-roll deposition rotates about a longitudinal axis. The drum is circular in a widthwise cross-section and has a shape in which opposite longitudinal edge portions have a narrower width than a longitudinal central portion. By using the drum for roll-to-roll deposition according to the present invention, it is possible to remove wrinkles occurring on a flexible substrate when a roll-to-roll deposition process is performed. As a result, it is possible to manufacture a film roll having a deposition layer with excellent widthwise thickness uniformity.
机译:根据本发明,用于卷对卷沉积的鼓绕纵轴旋转。鼓在宽度方向上的横截面是圆形的,并且具有相对的纵向边缘部分的宽度比纵向中央部分的宽度窄的形状。通过使用根据本发明的用于卷对卷沉积的鼓,当执行卷对卷沉积工艺时,可以去除在柔性基板上出现的皱纹。结果,可以制造具有在宽度方向上的厚度均匀性优异的沉积层的膜卷。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号