Roll-to-Roll Deposition Apparatus and Roll-to-Roll Deposition Method

摘要

[Object] To reduce heat damage to a film when a lithium layer is formed on the film by using a roll-to-roll system.;[Solving Means] A roll-to-roll deposition apparatus includes a vacuum chamber, a film travel mechanism, a lithium source, and a first roller. The vacuum chamber is capable of maintaining a reduced-pressure state. The film travel mechanism is capable of causing a film to travel inside the vacuum chamber. The lithium source is capable of making lithium melt inside the vacuum chamber. The first roller is disposed between a deposition surface of the film and the lithium source. The first roller has a transfer pattern that receives the molten lithium from the lithium source. The first roller transfers a pattern of a lithium layer corresponding to the transfer pattern to the deposition surface while being rotated.