- - SIZE-COMPONENT MEASURING DEVICE OF ULTRA-FINE TENANT AND SIZE-COMPONENT MEASURING METHOD

摘要

Disclosed are a size-component measurement device for an ultrafine particle, which provides excellent detection efficiency by having one light scattering module mounted between a trap unit and an ionization section unit for the ultrafine particle to correctly emit ionization laser on a time point when the ultrafine particle reaches, and a size-component measurement method. According to the present invention, the size-component measurement device for an ultrafine particle comprises: the trap unit receiving and trapping the ultrafine particle; a light scattering module coupled to a side surface of the trap unit and including a continuous wave laser emission unit which continuously emits a laser to the ultrafine particle moving from the trap unit, a scattering light detector which detects a scattering light signal generated when the ultrafine particle passes through the continuous wave laser beam by the continuous wave laser emission unit, and a reflective plate which reflects the scattering light to be collected to the scattering light detector; and the ionization section unit coupled to a side surface of the light scattering module and including an ionization laser emission unit which emits an ionization laser to the ultrafine particle, moving from the light scattering module and arriving after a required moving time of the ultrafine particle from a detection time of the scattering light signal, in order to ionize the ultrafine particle, and an ion mass analysis device which analyzes characteristics of the generated ion.