- - SIZE-COMPONENT MEASURING DEVICE OF ULTRA-FINE TENANT AND SIZE-COMPONENT MEASURING METHOD

摘要

A single light scattering module is mounted between the trapping portion of the ultrafine particles and the ionization region to accurately irradiate the ionizing laser at the time when the ultrafine particles arrive, thereby measuring the size-component and the size-component measuring method of the ultrafine particles with excellent detection efficiency Disclosed. The apparatus for measuring size-components of ultra-fine particles according to the present invention includes: a collection part in which ultra-fine particles are introduced and collected; It is coupled to the side of the collecting portion, the continuous-emitting laser irradiation unit continuously irradiating the laser to the ultra-fine particles moving from the collection unit, and the ultra-fine particles generated by the continuous-generating laser beam passing through the continuous-generating laser beam A light scattering module including a scattering light detector that detects a scattered light signal and a reflector that reflects the scattered light and is focused on the scattered light detector; And an ionization laser irradiation unit coupled to a side surface of the light scattering module and irradiating an ionizing laser to the ultrafine particles that have been moved from the light scattering module and reached after the required time for the movement of the ultrafine particles from the detection time of the scattered light signal. It characterized in that it comprises a; ionization region portion including an ion mass spectrometer for analyzing the properties of the generated ions.