EFEM EFEM EFEM AND GAS REPLACEMENT METHOD IN EFEM

摘要

An objective of the present invention is to provide an EFEM of a type for circulating inert gas in a housing which suppresses an increase in costs and suppresses particles in a transport chamber from being discharged. The EFEM (1) includes a transport chamber (41) in which nitrogen purified by an FFU (44) for removing particles flows in a prescribed direction, and a return path (43) to return nitrogen to the FFU (44) from a downstream side of the transport chamber (41), and circulates nitrogen. The EFEM (1) further includes a transport robot (3) which is arranged in the transport chamber (41), and performs a prescribed motion while retaining and supporting a wafer. The transport robot (3) includes: a case member (61) having an opening; an arm mechanism (70) which is arranged outside the case member (61), and retains and supports the wafer; a pole which supports the arm mechanism (70), and is inserted through the opening; and a driving mechanism which is accommodated in the case member (61), and drives the pole. A connection path (82a) connecting the case member (61) and the return path (43) is installed.