METHOD FOR MANUFACTURING METAL OXIDE FILM METAL OXIDE FILM THIN-FILM TRANSISTOR METHOD FOR MANUFACTURING THIN-FILM TRANSISTOR ELECTRONIC DEVICE AND ULTRAVIOLET IRRADIATION DEVICE

摘要

A precursor film forming step of applying a solution containing indium and a solvent on a substrate to form a precursor film of a metal oxide film; and a step of forming a precursor film on the heated precursor film by irradiating ultraviolet rays under an atmosphere of 10 Pa or less to form a precursor film as a metal oxide film A vacuum pump for decompressing the inside of the vacuum chamber to 10 Pa or less, and a vacuum pump for supporting the substrate in the vacuum chamber. And a light source for irradiating the supported substrate with ultraviolet light.