SYSTEM AND METHODS FOR DEFECT DETECTION USING A WHOLE RAW IMAGE

摘要

An apparatus for identifying a defect in an electronic circuit having periodic characteristics includes at least a camera and an image processing system for obtaining an image of the electronic circuit. An image processing system receives an image of an electronic circuit from a camera and performs at least a diagonal shift by a diagonal size of the periodic characteristic of the electronic circuit to produce a shifted image of the electronic circuit for the acquired image of the electronic circuit, (Golden) image for the electronic circuit using the at least one selected image area at a location that is closest to the identified defect candidate, using the image of the defect candidate and the moved image of the electronic circuit to identify the defect candidate, And determines the presence of defects in the electronic circuit using the at least one calculated local golden image of the electronic circuit and the image of the electronic circuit.