A pattern writing apparatus for drawing a predetermined pattern on a workpiece by a scanning spot of a laser beam, comprising: a light source device (14) for emitting the laser beam; A plurality of imaging units (U1 to U6) arranged to scan the other area on the object, the scanning spot including an optical scanning unit and a scanning scanning member for scanning light; and a plurality of imaging units And a plurality of selection optical elements (50, 58, 66) arranged in series along the traveling direction of the laser light from the light source device in order to switch whether or not to enter the selected imaging unit among the imaging units.
展开▼
