ECR A SMALL CONE TYPE MICROWAVE ECR PLASMA SOURCE FOR ION BEAM FIGURING AND INJECTION

摘要

A compact cone type microwave ECR plasma source for ion beam processing and implantation is disclosed. The microwave ECR plasma generator according to the present invention may include an input unit, a main body unit, and an output unit, and the configurations are detachable. The input unit may include a plasma gas supply unit, a microwave supply unit, a coaxial cable type power application unit, and a cooling water supply unit. The main unit may include a conical inner conductor having a radial slit, And may include a permanent magnet arranged outside the outer conductor to form a magnetic field, and the output section may include an extraction electrode for extracting the ion beam and a neutralizer for supplying electrons to the ion beam. The present invention is capable of drawing a high ion beam current amount from a high density plasma generated by the ECR phenomenon induced from the permanent magnet.