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CIGS CIGS Method for Producing CIGS Thin-Film CIGS Thin-Film Produced by the Method and Solar Cell Having the Same

机译:用于生产CIGS薄膜的CIGS CIGS方法该方法生产的CIGS薄膜以及具有该方法的太阳能电池

摘要

(A) placing an Ag layer comprising silver (Ag) on a substrate; The substrate on which the Ag layer is disposed is heated to 300 to 400 DEG C and is passed through a first evaporation source containing indium (In), gallium (Ga) and chalcogenide elements to deposit a first thin film on the substrate Step (B); (C) heating the substrate to 430 to 500 DEG C and passing the first thin film to a second thin film by passing the thin film to a second evaporation source including copper (Cu) and a chalcogenide element; And (D) passing the substrate through a third evaporation source including In, Ga and a chalcogenide element to convert the second thin film into a third thin film.
机译:(A)在基板上放置包含银(Ag)的Ag层;将其上沉积有银层的衬底加热到​​300至400℃,并使其通过包含铟(In),镓(Ga)和硫族化物元素的第一蒸发源,以在该衬底上沉积第一薄膜。 ); (C)将衬底加热到​​430-500℃,并通过将薄膜传递到包括铜(Cu)和硫族化物元素的第二蒸发源,将第一薄膜传递给第二薄膜; (D)使衬底穿过包括In,Ga和硫族化物元素的第三蒸发源,以将第二薄膜转换成第三薄膜。

著录项

  • 公开/公告号KR101969976B1

    专利类型

  • 公开/公告日2019-04-18

    原文格式PDF

  • 申请/专利权人 한국과학기술연구원;

    申请/专利号KR20170118839

  • 发明设计人 정증현;김원목;박종극;

    申请日2017-09-15

  • 分类号H01L31/0392;C23C14/14;H01L31/0224;H01L31/18;

  • 国家 KR

  • 入库时间 2022-08-21 11:48:44

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