IGZO IGZO IGZO SPUTTERING TARGET AND IGZO FILM

摘要

Ine(In), morality and justice (Ga), zinc (ZN) and oxygen (O), as the stretching routine for curing body, In, Ga, ZN is 0.575 ~ In/1 0. of (In Ra Ga)5000000, and be Zn/the composition range of Ga Za Zn, (InxGa(1-x)) 2ZnO4(1 codes x on 0) encourage the tissue possessed on single, or (InxGa(1-x)) 2ZnO 4(1 volumes of x SIC 0) encourage and encouraged with In2O 3, tissue with 2 structures becomes the feature that maximum diameter on Inftt3 is 10 or so. The low resistance of stretching routine target and the concentration of luggage case with certain range hereinafter, and reach the densification of target, and inhibit hypersensitive generation, the tooth neck technology of DC String can be provided.