PHOTORESIST BUBBLE CLEAR RECLAIM SUPPLY SYSTEM

摘要

The present invention relates to a photoresist liquid bubble removal and regeneration supply device to remove air introduced into a container when the container filled with a photoresist liquid is replaced and to regenerate the photoresist liquid by removing the air existing in a bubble form in the photoresist liquid. According to the present invention, the photoresist liquid bubble removal and regeneration supply device comprises: a container filled with the photoresist liquid and having a cap connected to an opening; an air exhaust means removing the air introduced into a space inside the container when the container is replaced; a photoresist liquid circulating means circulating the photoresist liquid by injecting a pressurized gas into the container, and removing the air and the pressurized gas existing in the form of bubbles in the photoresist liquid to regenerate the photoresist liquid; and a photoresist liquid supply means supplying the photoresist liquid regenerated by the photoresist liquid circulation means to a place of intended use.