PHOTORESIST SUPPLY APPARATUS TO PREVENT AIR BUBBLE GENERATED IN REPLACING STORING UNIT FROM BEING INTRODUCED TO SUPPLY LINE

摘要

Purpose: a photoresist power supply device is arranged to prevent bubble, it is generated, replacing a store unit horizontally bending to be inserted in terms of photoresist is directed to the inside of a supply line from one end of the supply line in the surge tank that store unit is provided. Construction: photoresist is stored in a store unit. One surge tank buffers the photoresist provided from store unit. Store unit is connected to surge tank by a supply line (130a, 130b). A part of supply line is inserted into surge tank, one end bending of supply line.