APPARATUS FOR INSPECTING WARPAGE OF BOARD-LIKE BODY AND METHOD FOR INSPECTING WARPAGE OF BOARD-LIKE BODY

摘要

A transfer device 3 for transferring the glass substrate 2 in a substantially horizontal posture and a non-contact type displacement gauge 4 for measuring the distance to the surface of the glass substrate 2, The upper limit waveform X1 and the lower limit waveform X2 are previously set on the basis of the ideal waveform X0 with respect to the conveying direction of the surface shape displacement of the glass substrate 2 to be obtained and the distance measured by the displacement meter 4 Whether the actual waveforms X3 and X4 with respect to the conveying direction A of the surface shape displacement of the glass substrate 2 during conveyance are between the upper limit waveform X1 and the lower limit waveform X2 .