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ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSIONCD METROLOGY
ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSIONCD METROLOGY
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机译:基于库的关键尺寸CD计量学的快速准确的神经网络训练
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摘要
An approach to accurate neural network learning for library-based critical dimension (CD) metrology is described. An approach to rapid neural network learning for library-based CD metrology is also described.
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