SUBSTRATE ALIGNMENT APPARATUS SUBSTRATE PROCESSING APPARATUS SUBSTRATE ARRANGEMENT APPARATUS SUBSTRATE ALIGNMENT METHOD SUBSTRATE PROCESSING METHOD AND SUBSTRATE ARRANGEMENT METHOD

摘要

The motor of the substrate aligning device successively rotates the plurality of substrates to be held by the substrate holding portion in the vertical posture in the circumferential direction. The control unit controls the motor based on the input information and bending-notch position information inputted for the bending states of the plurality of substrates, and determines the position of the notches in the circumferential direction of the plurality of substrates. This reduces the distance in the thickness direction between the lower edge portion and the upper end of each substrate in the state held by the substrate holding portion. As a result, handling of the plurality of substrates held by the substrate holding portion can be facilitated.