Acoustic-optic deflection system laser processing apparatus including the same and method for blocking beams of acoustic-optic deflection system

摘要

Disclosed is an acousto-optic deflection system, a laser processing apparatus including the same, and a method for blocking beams of the acousto-optic deflection system. According to the present invention, the acousto-optic deflection system, which is able to use an acousto-optic effect to deflect the emission angle of laser beams, comprises: one or more acousto-optic deflectors which emit a part of incident laser beams by deflecting the laser beams by another angle than the incident angle to emit another part of the incident laser beams by letting the part of the laser beams with the same angle as the incident angle; a first dumper which includes a first opening, which allows at least a part of the laser beams, which are emitted by being deflected by the acousto-optic deflector, to pass through, and which block the laser beams emitted by transmitting by the acousto-optic deflector; a condensing lens which condenses the laser beams that have passed through the first opening of the first dumper; and a second dumper which blocks a part of the laser beams condensed by the condensing lens.