Development of multi-environment dual-probe atomic force microscopy system using optical beam deflection sensors with vertically incident laser beams

摘要

We developed a dual-probe atomic force microscopy (DP-AFM) system with two cantilever probes that can be operated in various environments such as in air, vacuum, and liquid. The system employs the optical beam deflection method for measuring the deflection of each cantilever mounted on a probe scanner. The cantilever probes mounted on the probe scanners are attached to inertia sliders, which allow independent control of the probe positions. We constructed three types of probe scanners (tube, shear-piezo, and tripod types) and characterized their performance. We demonstrated AFM imaging in ambient air, vacuum, and ultrapure water, and also performed electrical measurement and pick-up manipulation of a Au nanorod using the DP-AFM system.