CZTSSe CZTSSe CZTSSe CZTSSe FILM FORMING METHOD FOR CZTSSe FILM CZTSSe SOLAR CELL AND MANUFACTURING METHOD FOR CZTSSe SOLAR CELL

摘要

The present invention relates to a CZT(S,Se)-based thin film for a solar cell which comprises a step of preparing a substrate; a step of forming a precursor layer by depositing all four components of Cu, Zn, Sn, and Se or S on a surface of the substrate with a simultaneous vacuum evaporation process; and a step of forming a CZT(S,Se)-based thin film by thermally treating the precursor layer under a Se or S atmosphere. In the process of performing the simultaneous vacuum evaporation process, the substrate is maintained at a temperature range of 150 to 320°C. The present invention can improve the quality of the CZT(S,Se)-based thin film by forming the precursor layer with the simultaneous vacuum evaporation process at a temperature that can form seeds, and thus uniformly forming CZT(S,Se) in a selenization or sulfidation thermal treatment process. Also, the present invention can form a high quality CZT(S,Se)-based thin film by performing the selenization or sulfidation thermal treatment process with respect to the precursor layer formed with seeds, and thus performing the thermal treatment process at a relatively high temperature for a short time, thereby reducing manufacturing time and energy and lowering manufacturing costs.