mikromechanisches component and manufacturing process for a mikromechanisches component

摘要

mikromechanisches component (1) with:a piezoelectric element (2, 5), and the piezo electric element (2, 5), a voltage is so anlegbar is that the piezoelectric element (2),5) from a first endabschnitt (q) of the piezoelectric elements (2, 5) to a second endabschnitt (r) of the piezoelectric elements (2, 5) providing length changes.a hebelelementeinrichtung (3, 4, 12), with the hebelelementeinrichtung (3, 4, 12), a first hebelelement (3) and a second hebelelement (4) inwith the first hebelelement (3) on a first end of the first hebelelements (3) with the first endabschnitt (q) of the piezoelectric element (2),(5) is connected to the second hebelelement (4) at a first end of the second hebelelements (4) with the second endabschnitt (r) of the piezoelectric elements (2, 5) is connected.and with the two hebelelemente (3, 4) are connected with each other and one level opening, anda component (14), with the hebelelementeinrichtung (3, 4, 12) with the component (14) for moving the element (14) is coupled such that the piezoelectric element (2),5) the tension of a movement of the hebelelementeinrichtung (3, 4, 12) to move with the hebelelementeinrichtung (3, 4, 12) coupled device (14) causes;characterized by the fact thatthe first hebelelement (3) at a second end of the first hebelelements (3) with a second end of the second hebelelements (4) is connected.with a distance (h) of the second end of the first hebelelements (3) and the second end of the second hebelelements (4) of the section (p) of the hebelelementeinrichtung (3, 4,12) to the piezoelectric element (2, 5) by means ofto the piezoelectric element (2, 5) voltage applied along a first axis (z) variierbar; andas an optical element (14) in a manner trained element section (p) of the hebelelementeinrichtung (3, 4, 12) is connected.the component (14) by means of the piezo electric element (2, 5) voltage applied to at least one perpendicular to the first axis (z) and second axis (y), 24,25) revolving.