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Vacuum container of a laser oscillator

机译:激光振荡器的真空容器

摘要

A vacuum container (10) of a laser oscillator (30), said vacuum container (10) comprising: a tube (11) having a cylindrical shape or a polygonal cylindrical shape; an insertion member (12) into which said tube is inserted; anda first seal member (15) and a second seal member (16) disposed between the tube and the insert member, the first seal member being made of a material whose corrosion resistance is higher than that of the second seal member, the first seal member with respect to second seal member is disposed on a vacuum side, the second seal member is made of a material whose sealing property is higher than that of the first seal member, and the first seal member at least partially comprises a deformation portion (18a to 18e) which deforms so as to improve its sealing property wherein the deformation portion (18a) is deformed due to a reduction in pressure around the first seal member.
机译:激光振荡器(30)的真空容器(10),所述真空容器(10)包括:具有圆柱形状或多边形圆柱形状的管(11);和用于使所述振荡器产生真空的容器。所述管插入其中的插入构件(12);第一密封件(15)和第二密封件(16)设置在管和插入件之间,第一密封件由耐腐蚀性高于第二密封件的材料制成。相对于第二密封部件设置在真空侧,第二密封部件由密封性能高于第一密封部件的材料制成,并且第一密封部件至少部分地包括变形部(18a至变形部18e)变形以提高其密封性能,其中变形部18a由于第一密封构件周围的压力降低而变形。

著录项

  • 公开/公告号DE102016009569B4

    专利类型

  • 公开/公告日2019-04-25

    原文格式PDF

  • 申请/专利权人 FANUC CORPORATION;

    申请/专利号DE20161009569

  • 发明设计人 TAKANORI SATO;TETSUHISA TAKAZANE;

    申请日2016-08-05

  • 分类号H01S3/02;F16J15/16;

  • 国家 DE

  • 入库时间 2022-08-21 11:45:37

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