Device with loading port holders and a loading opening, loading opening for optical reticle and method for operating a loading opening

摘要

A device adapted to insert or remove a mask container has a first loading port holder and a second loading port holder spatially separated from the first loading port holder. The first loading port holder and the second loading port holder each comprise at least parts of an L-shaped rectangular prism. The first loading port holder and the second loading port holder are arranged diagonally about a rectangular area, wherein first inner side walls of the first loading port holder and second inner side walls of the second loading port holder define boundaries of the rectangular area, wherein a first width of the rectangular area is equal to a second width of the mask bin; a first length of the rectangular area is equal to a second length of the mask container.