LOAD PORT DEVICE AND OPERATING METHOD OF THE SAME

摘要

An objective of the present invention is to provide a load port apparatus, using a load port corresponding to a first cassette containing a circular wafer with a diameter of 300 mm to install a second cassette receiving a circular wafer with a diameter of 200 mm, so as to lock the second cassette. According to the present invention, the load port apparatus comprises a cassette main body having an opening formed on one side surface and a cover to open/close the opening. Accordingly, a cassette capable of containing an object to be contained therein is fixed on a carrier base by a lock device, and the object to be contained inside the cassette is loaded or unloaded as the cover is opened/closed. The lock device includes: a locking hook to rotate between a retracting posture and a locking posture around a shaft with a predetermined inclination with respect to the bottom surface of the cassette main body, to move along the shaft, and to come in contact with a member to be locked of the cassette body in the lock posture; and a rod to be rotated and axially moved with the locking hook.